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Subject: Re: Calibration of Mass Flow Controllers

Date: 09/13/02 at 3:20 AM
Posted by: Garry Williams
E-mail: garry_will@msn.com
Message Posted:

In Reply to: Calibration of Mass Flow Controllers posted by Allan Knoll on 09/12/02 at 8:12 AM:

Hi Allan,
Where are you measuring the flow from the output of the MFC - to atmosphere or in vacuum chamber or from the Ion Gun? What are you using to drive the MFC (who's controller)? Do you have a reliable RGA set up on the system to check your calibration with? How old are these MFC's.


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