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Subject: Re: Calibration of Mass Flow Controllers

Date: 09/12/02 at 7:31 PM
Posted by: Donald Mattox
E-mail: donmattox@svc.org
Message Posted:

In Reply to: Calibration of Mass Flow Controllers posted by Allan Knoll on 09/12/02 at 8:12 AM:

Wow! Mass flow is mass flow. Some thoughts. The bubble-type flow meter is made to work at a constant pressure on each side of the bubble. A pressure diffence will throw it off. I assume the flow meters are in series. If the bubble meter is upstream of the MKS (thermal) MFM it may introduce moisture into the gas stream that would affect the cooling rate in the MKS MFM. A higher cooling rate would show up as a higher gas flow. Don Mattox

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