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Date: 09/12/02 at 7:31 PM
Posted by: Donald Mattox
E-mail: donmattox@svc.org

In Reply to: Calibration of Mass Flow Controllers posted by Allan Knoll on 09/12/02 at 8:12 AM:

Wow! Mass flow is mass flow. Some thoughts. The bubble-type flow meter is made to work at a constant pressure on each side of the bubble. A pressure diffence will throw it off. I assume the flow meters are in series. If the bubble meter is upstream of the MKS (thermal) MFM it may introduce moisture into the gas stream that would affect the cooling rate in the MKS MFM. A higher cooling rate would show up as a higher gas flow. Don Mattox

Follow Ups:

  Re: Calibration of Mass Flow Controllers Pat McMahon   Posted at: 09/12/02 (5)

  Re: Calibration of Mass Flow Controllers Donald Mattox   Posted at: 09/13/02 (4)

  Re: Calibration of Mass Flow Controllers Donald Mattox   Posted at: 09/14/02 (0)

  Re: Calibration of Mass Flow Controllers Donald Mattox   Posted at: 09/13/02 (2)

  Re: Calibration of Mass Flow Controllers Allan Knoll   Posted at: 09/17/02 (1)

  Re: Calibration of Mass Flow Controllers Bob Williams   Posted at: 11/05/03 (0)

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