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Subject: Re: darker colour problem in cr sputtering on glass

Date: 08/27/02 at 5:52 PM
Posted by: Donald Mattox
E-mail: donmattox@svc.org
Message Posted:

In Reply to: darker colour problem in cr sputtering on glass posted by c.s.lee on 08/26/02 at 1:23 AM:

Pat is quite right. You should have a cold trap and make sure you are using silicone oil in the diffusion pump. In addition you might try running an AIR glow discharge in the chamber just before and after the crossover. The oxygen in the discharge will convert hydrocarbons to CO2 and will convert silicone vapors to SiO2.. This can be done on evey run. Don Mattox


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