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Subject: Can cbn be sputtered by reactive dc?

Date: 08/22/02 at 8:35 AM
Posted by: wilfred
E-mail: wilfredcheong@hotmail.com
Message Posted:

I would appreciate if someone can guide me if i can sputter cbn onto steel using high voltage reactive dc w/o magnetron. I've studied it can be done from hbn/b4c by dc magnetron . I'm into small scale hobby with no throughput. Presently, i have 0~5kv 50mA power supply, chamber size abt 4"dia & 8" ht. Pump at 70 l/min to 30 mtorr is not a problem. If it can be done, what is the target size/material for optimisation, the ratio & the pressure of Ar/N2 to be introduced, total chamber pressure, substrate temperature & the rate of depo are unknown to me. Thanks.

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