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Subject: Re: Using diffusion pump systems for ARcoatings

Date: 08/19/02 at 12:23 PM
Posted by: Donald Mattox
E-mail: donmattox@svc.org
Message Posted:

In Reply to: Using diffusion pump systems for ARcoatings posted by Hemang Jesrani / Astro Optics Pvt. Ltd. on 08/18/02 at 8:30 AM:

Diffusion pumps were the ONLY high vacuum pump used for many years to deposit optical coatings. They work quite well if properly operated (watch crossover pressure), cold-trapped, maintainded and occasionally cleaned using an oxygen plasma. Do not use hydrocarbon pump oil. Don Mattox

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