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Subject: How do I negatively Bias a Substrate

Date: 08/17/02 at 12:21 PM
Posted by: Sony Varghese
E-mail: varsony@hotmail.com
Message Posted:

I am working on a PVD coating system that coats Titanium on carbide tools. To improve adheasion I am trying to design an attachment so that I can give a negative bias of about -1000 V DC to the substrate. The problem is I am not sure how to do it. Research papers talk about negative bias being used but I was not able to find how its done. I am sure its a common technique. Could any of you please direct me as to where I could look for help.

Thank you,

Sony Varghese

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