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Subject: Re: Backstreaming problem

Date: 11/11/01 at 7:44 PM
Posted by: Mike Markovich
E-mail: ivac@toolrpotect.com
Message Posted:

In Reply to: Backstreaming problem posted by Anneleen on 10/25/01 at 10:08 AM:

Hi, Anneleen

In our chambers ( using for TiN and other PVD)
wall and valve contaminations problem
can be significantly lager then "backstreaming problem".

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