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Subject: ion pumps

Date: 08/17/01 at 4:41 PM
Posted by: steve boza
E-mail: steveb@vactek.com
Message Posted:

In Reply to: pure titanium film posted by Erkan Konca on 08/16/01 at 5:50 PM:

Erkan,

Ion pumps normally obtain a ultimate pressure of
-12 torr. In sputtering applications -8 torr would be a bit on the high side and your product may not have obtain the quality you require.

Steve Boza
vactek
http://vactek.com


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