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Subject: pure titanium film

Date: 08/16/01 at 5:50 PM
Posted by: Erkan Konca
E-mail: ekonca@yahoo.com
Message Posted:

Hello,

What should be the minimum vacuum level to obtain a pure (relatively pure) titanium films by magnetron sputtering?
Is 3E-8Torr good enough?

Thanks

Erkan


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