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Subject: Re: Vac Deposition coating Aluminum
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Date: 10/12/01 at 7:16 PM
Posted by: Vladimir Tchoutko
In Reply to: Re: Vac Deposition coating Aluminum posted by MIKE PLAISTED on 09/15/01 at 11:39 AM:
If you use termal evaporation you have to keep the following main rules: 1. Residual vacuum less than 2x10-5 torr, 2. Fast evaporation (for instance, evaporate small pieces of aluminum foil placed on tugsten spiral), 3. It is better to use an ion beam substrate cleaning before coating but glow discharge works not bad too. My friends obtained very good aluminum films using e-beam evaporation with ion beam assistance. Sure, a lot of things depend on aluminum quality.
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