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Subject: SiO2 rf magnetron sputtering

Date: 10/09/01 at 5:49 AM
Posted by: Mike C
E-mail: mtlc2@cam.ac.uk
Message Posted:

Hi All
I'm looking for information on sputter coating a 100 nM
thick SiO2 layer onto gold (200 nM) coated silicon wafers.
Any thoughts on sputtering conditions or on the micro porosity of the silica surface would be appreciated. I'm using an Edwards BOC sputter coater Auto 500

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