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Subject: Re: pure titanium film

Date: 10/07/01 at 11:06 PM
Posted by: Ted Van Vorous
E-mail: cathodes@uswest.net
Message Posted:

In Reply to: pure titanium film posted by Erkan Konca on 08/16/01 at 5:50 PM:

You can get very good films of Ti
by pumping to the low 10-6 torr range and
backfilling to 1-3 microns of argon. Don't be
surprised to see your pressure drop when you
start sputtering. Ti is a very strong getter.

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