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Subject: Re: Diffusion Pump oscilation

Date: 09/18/01 at 10:56 PM
Posted by: bowie
E-mail: at163@163.net
Message Posted:

In Reply to: Diffusion Pump oscilation posted by Carlos Peralta on 09/18/01 at 12:05 PM:

Please check the foreline (outlet) presure, both before and after the hivac valve is closed. The presures should be:
<10^-4 mbar (hivac valve closed)
<.1mbar (hivac valve opened)
If so, the diffusion pump fuel may be burned out, if not, the diffusion pump is ok, check the fore pumps, or if there's any leakage somewhere.


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