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Subject: Re: Flowmeters Coating Applications

Date: 05/01/02 at 1:42 AM
Posted by: David Van Vorous
E-mail: dvanvorous@attbi.com
Message Posted:

In Reply to: Flowmeters Coating Applications posted by Editor Phil on 04/18/02 at 11:12 AM:

Theres a fair number of brands but the majority are a thermal mass flow meters configuration. MKS, Brooks, Tylan, Edwards, Sierra, and Unit are the brands Ive either used or evaluated with maximum flow rates from 10 sccm to 5 slpm N2 for sputtering appications.

D.


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