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Subject: PE-CVD Coating with pure Si

Date: 04/30/02 at 10:35 AM
Posted by: Rudy O'Doherty
E-mail: rudy.odoherty@axcelis.com
Message Posted:

I am looking for a company that can PE-CVD a minimum of 15 microns of pure (99.999%) semiconductor grade Silicon onto small 3 dimensional Aluminum parts. Only certain areas of the parts are to be coated. I have thousands of parts that need coating so this job would be ongoing production work. I have called over 350 companies in the USA and only a couple of them are willing to attempt taking on this job but I do not have any samples to evaluate as of yet. I cannot change our specs or apply the Si in any way that would change our desired finished product. If there is a ompatible method of applying the Si so that the purity measured off the substrate is met, along with the thickness and adhesion, I would consider a new process.
Thank you

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