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Subject: indium coating with e-beam

Date: 04/20/02 at 5:46 AM
Posted by: Zhang YC
E-mail: eyczhang@ntu.edu.sg
Message Posted:

Hi, all,

We share one e-beam evaporator in our lab. I want to do indium coating using it but have no idea to prevent the contamination of chamber with Indium. Because of its low melting point, I fear that any Indium remains will badly influence other materials' process. Any suggestion will be extremely appreciated.

Thanks a lot

Zhang Yuanchang


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