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Subject: indium coating with e-beam
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Date: 04/20/02 at 5:46 AM
Posted by: Zhang YC
We share one e-beam evaporator in our lab. I want to do indium coating using it but have no idea to prevent the contamination of chamber with Indium. Because of its low melting point, I fear that any Indium remains will badly influence other materials' process. Any suggestion will be extremely appreciated.
Thanks a lot
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