[ List Subjects ][ Current Board ][ Post Message ]
Subject: Re: Target of SiO2 powder?
[ View Followups ][ Post Followup ]
Date: 04/15/02 at 4:05 PM
Posted by: Ted Van Vorous
In Reply to: Re: Target of SiO2 powder? posted by Pat McMahon on 04/01/02 at 10:02 PM:
We used to make cathodes expressly designed for
use with unconsolidated powder targets that were
to be used in situations like yours. The target
material grain size was rather critical because
too fine a powder tended to "explode" from the
cathode face when sputtering started.
Most of the customers were "budget restrained"
as you might imagine. The cathodes were basically
a standard unit with a rim around the edge to hold
the powder charge. We also built a model with
three powder "boxes" with a three bladed shutter
so that multiple materials could be sequentially
deposited. The sputtering started when a shutter
segment opened. CAUTION. Powder will adsorb gases
that are released rapidly when deposition starts.
I hope these comments are of interest to you.
Ted Van Vorous
Post a Follow-up: