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Subject: depositing HfO2 from Hf metal

Date: 04/04/02 at 3:30 PM
Posted by: Traci Jensen
E-mail: tjensen@omegafilters.com
Message Posted:

I would like to try making a HfO2 film by e-beam evaporating
hafnium metal (in the presence of oxygen) instead of starting
from HfO2 tablets. What type of crucible material should be
used? The Hf I have is in the form of metal shavings- should
these be conditioned into a solid plug of Hf? If so should the
conditioning be done without any oxygen to avoid forming a
layer of HfOx on the surface? I would greatly appreciate any
details anyone could provide.

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