[ List Subjects ][ Current Board ][ Post Message ]
[ View Followups ][ Post Followup ]

Date: 04/04/02 at 3:30 PM
Posted by: Traci Jensen
E-mail: tjensen@omegafilters.com

I would like to try making a HfO2 film by e-beam evaporating
hafnium metal (in the presence of oxygen) instead of starting
from HfO2 tablets. What type of crucible material should be
used? The Hf I have is in the form of metal shavings- should
these be conditioned into a solid plug of Hf? If so should the
conditioning be done without any oxygen to avoid forming a
layer of HfOx on the surface? I would greatly appreciate any
details anyone could provide.

Follow Ups:

  Re: depositing HfO2 from Hf metal mike plaisted   Posted at: 04/04/02 (0)

Post a Follow-up:

Name:
E-Mail:
Subject:

Message to Post: