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Subject: Re: more info please
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Date: 03/26/02 at 11:27 AM
Posted by: Jim Arps
In Reply to: more info please posted by charlie on 03/14/02 at 1:17 PM:
Experience in our laboratory suggests this method (plasma ashing) can be somewhat slow to remove DLC coatings. Any idea how thick your's are, do you know if the coatings are hydrogenated and/or contain silicon? Heating may do the trick, 500C in air may be enough.
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