| Home | Terms of Use | Site Map | Contact Us |
IndustryCommunity.com > Manufacturing Community > Forum of High Vacuum Technology/Processing/Coating > Message
Main Menu

[ List Subjects ][ Current Board ][ Post Message ]
[ View Followups ][ Post Followup ]

Subject: Re: Glow Discharge cleaning

Date: 03/18/02 at 6:17 PM
Posted by: Donald Mattox
E-mail: donmattox@svc.org
Message Posted:

In Reply to: Glow Discharge cleaning posted by Ken Hunter on 11/29/01 at 12:48 AM:

Glow discharge cleaning is comprised of two parts. One is the "ion scrubbing" action of ions accelerrated across the plasma sheath that is formed on any surface in contact with a plasma. This is good for desorbing contaminants such as water vapor. The other is the "reactive plasma cleaning" by species such as oxygen that react with and volatilize compounds such as hydrocarbon contamination - so air is good. The negative elecrode should be as close to the geometry of the surface as possible to give a uniform plasma density over the substrate surface. For a more complete description of plasma cleaning refer to HANDBOOK OF PHYSICAL VAPOR DEPOSITION (PVD) PROCESSING. Don Mattox

Follow Ups:

Post a Follow-up:


Message to Post:


Click here:
1999-2001 Sunlit Technology Co., Ltd. All rights reserved.