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Subject: Re: Vacuum Sputtering Pumping Time

Date: 03/11/02 at 12:02 PM
Posted by: Verheyen Pascal
E-mail: pascal@sinvaco.com
Message Posted:

In Reply to: Vacuum Sputtering Pumping Time posted by TIM Kuo on 02/25/02 at 7:18 AM:

Very much depending an vacuum pump system.
Ranges between 1 hour to 24 hours.
Shorter pumping time if combined with water vapour pumping capacity

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