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Subject: Vacuum Sputtering Pumping Time

Date: 02/25/02 at 7:18 AM
Posted by: TIM Kuo
E-mail: youmustplay@hotmail.com
Message Posted:

I am currently working at a Low-E coating line,íK..
Just wondering how is other production line manage their vacuuming time~ What is the approximate time to pump down the pressure down to 3 x 10-6 mbar?
Any one willing to share his thought on Vacuuming?

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