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Subject: Re: PE2400 dark area shields
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Date: 01/21/02 at 10:42 PM
Posted by: Pat McMahon
In Reply to: PE2400 dark area shields posted by Maciej Wojdak on 01/18/02 at 9:48 AM:
What you suggest is quite feasible and I have used it many times, mostly with precious metal targets. Be aware that the surface area of a 3" diameter target is about 1/8 the surface area of an 8" diameter target and you must adjust your power density accordingly. Also be sure to maintain an even spacing between the entire electrode including the target and the dark space shield to prevent unwanted discharges which could disrupt proper deposition. Do not expect very good deposition uniformity.
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