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Subject: PE2400 dark area shields

Date: 01/18/02 at 9:48 AM
Posted by: Maciej Wojdak
E-mail: mwojdak@phys.uva.nl
Message Posted:

Dear all,

I am using Perkin Elmer 2400 sputterer to deposit SiO2/Si

The targets in my system are 8", but in the case of buying
new targets I would like to use smaller.
I have one shield to use 6" target.
Is there any limit in the size reduction?
Maybe I can make a shield from 8" to 3", using a stainless steel plate?

best regards,

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