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Subject: Re: Hafnium Oxide Evaporation without inhomogeinity
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Date: 01/04/02 at 6:19 AM
Posted by: Hemang
In Reply to: Re: Hafnium Oxide Evaporation without inhomogeinity posted by charlie on 11/30/01 at 10:36 AM:
Thanks for the help and sorry for the delay in following up. I am using temperatures of 270 and rate of 3A/s , oxygen pressure of 2x10^-4 mbar. We start the coatings mostly at 2x10^-5mbar. I have used one side frosted witness samples to get a reflection curve on our Perkin Elmer lambda15. The minimum points are comint to less than the substrate reflection which indicates inhomogeinity. I hope I am correct in my assumptions. I am using Hafniuum Oxide evaporated from copper crucible using e-b gun. What index is achievable? How much effect does the heating current of the e-b gun filament have on this.
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