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Subject: sputtering simulation sofware

Date: 12/17/01 at 4:43 AM
Posted by: Yu-Yao Chen
E-mail: yychen@south.helix.com.tw
Message Posted:

Dear all:

I am looking for some modeling softwares for the magnetron sputtering cathode design, plasma distribution simulation in the sputtering chamber and deposition rate prediction.

Thank you

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