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Subject: Re: SPUTTER POWER DISTRIBUTION
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Date: 12/16/01 at 10:53 PM
Posted by: Pat McMahon
In Reply to: SPUTTER POWER DISTRIBUTION posted by MIKE PLAISTED on 12/16/01 at 3:54 PM:
There is not enough information in your question to give a reasonable answer. Is the 10KW DC or RF?
Is the target a dielectric or conducting? Is the deposition pure material or reactively sputtered? Is the configuration planar diode or magnetron?
Let me know what exactly you are doing and I may be able to help you.
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