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Subject: SPUTTER POWER DISTRIBUTION

Date: 12/16/01 at 3:54 PM
Posted by: MIKE PLAISTED
E-mail: mike108@together.net
Message Posted:

I need a sanity check. Anyone with a fact or an opinion is most welcome to reply.

If a sputter cathode 1 meter by 250 mm target is assembled with 4 tiles 250x250 mm, two on one end are 4mm thick and the other tiles are 12 mm thick, what is the approximate powere dissipated on each tile from a total of 10 kW?

My problem is not that I don't have an ansewer, it's because I have too many.

mike plaisted


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