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Subject: Fore Vacuum Pressure

Date: 12/03/01 at 8:46 AM
Posted by: Anneleen
E-mail: Annieds9@hotmail.com
Message Posted:

Dears,

Can someone explain me the following settlement:

When the fore vacuum pressure is 10E-3mbar, we measure in our diffusionpump temperatures of 150C (oil).
When the fore vacuum pressure is 10E-2mbar, we measure temperatures of 110C.
That's a difference of 40C. I do not see the link between the temperature en this pressure?

A consequence is more backstreaming (oil temp is not high enough anymore), and that's what I need to avoid.

Hoping someone can explain me,
Thanks a lot,
Anneleen


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