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Subject: Re: Hafnium Oxide Evaporation without inhomogeinity
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Date: 11/30/01 at 10:36 AM
Posted by: charlie
In Reply to: Re: Hafnium Oxide Evaporation without inhomogeinity posted by Vladimir Tchoutko on 11/30/01 at 12:06 AM:
I agree with Vladimir. In fact, every parameter has to be stable: temperature(we use 250C), pressure, oxygen pressure, rotation speed(not too slow), evaporation speed(not too fast). I have been getting very good uniform profiles for refractive index.
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