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Subject: Re: Hafnium Oxide Evaporation without inhomogeinity

Date: 11/30/01 at 12:06 AM
Posted by: Vladimir Tchoutko
E-mail: chutko@earthlink.net
Message Posted:

In Reply to: Re: Hafnium Oxide Evaporation without inhomogeinity posted by Hemang on 11/29/01 at 11:24 PM:

As I know for HfO2 the substrate temperature is very important and should be about 130C (real substrate temperature, not what you see on thermocouple!). And, of course, try to increase rotation speed. Some people obtaint a good result evaporating pure metal Hf in oxygen, not HFO2 tabelets.

Regards,

Vladimir


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