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Subject: Hafnium Oxide Evaporation without inhomogeinity

Date: 11/29/01 at 1:00 AM
Posted by: Hemang Jesrani
E-mail: info@astro-optical.com
Message Posted:

I have a Leybold L-560 coating plant with e-b gun and I am not getting a homogenous film of HfO2 on evaporation. I have tried changing the rate of evaporation, oxygen pressure etc. If anyone has any suggestions, please let me know, thanks.

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