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Subject: e-beam evaporation of Al
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Date: 10/08/00 at 4:27 PM
Posted by: C-A Berseth
We recently purchased an electron beam evaporator. Some problems remain to be solved :
- Al is placed in a boron nitride liner. There is a huge
amount of scattered electrons as seen from the fast
heating of a Cu shield that is behind the e-gun.
-> Is the Al source accumulating charge ? Should I
ground it ?
- We determined that the strong pressure rise during
evaporation is due to the scattered electrons and the
evaporated metal hitting the chamber and gun parts.
-> Is this commonly observed ? How is it dependent upon
the crucible liner type and source type ?
All input appreciated ! Thanks,
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