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Subject: Re: chamber pumping

Date: 09/21/00 at 8:18 PM
Posted by: Rob Pierce
E-mail: rob_pierce@cohr.com
Message Posted:

In Reply to: Re: chamber pumping posted by merle hirsh on 09/15/00 at 5:48 PM:

thanks for the advice, as it turned out you were correct on both matters, one of the rotary pumps in one of the pump stacks (we have 2) was not pumping efficiently and had to be replaced, and we have several leaks on the chamber as a result of too high a working temperature. all is well now.


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