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Subject: Re: chamber pumping
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Date: 09/15/00 at 5:48 PM
Posted by: merle hirsh
In Reply to: chamber pumping posted by Rob Pierce on 09/13/00 at 11:32 AM:
Close the valve to the pump, and measure the pressure in the sealed off chamber as a function of time. If it is large (greater than about 5 mTorr/min, there is a leak in the system. If it is smaller than ~1 mTorr/min, the system is tight, but the pump is not working. One thought is that there is mechanical pump oil in the diffusion pump as a result of the power outage, and it outgases like crazy when heated to diff pump temperature. (If you don't use a diff pump, ignore the last remark!) By the way, I consult...
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