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Subject: chamber pumping

Date: 09/13/00 at 11:32 AM
Posted by: Rob Pierce
E-mail: rob_pierce@cohr.com
Message Posted:

Please help.
Although I have quite some experience in maintenance and in operation of a coating chamber, this one has got me stumped.
After rebooting the plant because of a power cut, I cannot get it to pump any lower than 1.5e-1. Needless to say I, the maintenance guy, and my manager have tried everything we know.
Is there someone who can help?

Thanking you in advance.

R.


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