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Subject: Re: Silicon sputtering targets
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Date: 08/24/00 at 5:36 AM
Posted by: MIKE P
In Reply to: Re: Silicon sputtering targets posted by cruz on 06/07/00 at 12:04 AM:
We produce 10% aluminum in high purity silicon as a standard product. A minumum of 3% is possible. We think of them as alloys and not dopped materials. Today it's aluminum because no one has asked for those percentages in any other materials.
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