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Subject: Hall measurements on conductive thin films
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Date: 08/23/00 at 10:27 PM
Posted by: Espinůs, J.P.
I am a Spaniard working in the field of Transparent Conductive Thin
(in particular, Al doped ZnO thin films) for a year. My project
requires me to prepare by assisted CVD methods (mainly plasma
assisted and ion beam assisted) and characterize these thin films.
Can anyone kindly suggest some books or literature available on
electrical characterization of conductive thin films (thickness lower
than 500 nm) by Hall measurements by the van der Pauw method?. In
particular, I need to know as many relevant experimental details as
possible (sample dimensions, how to make the electrode contacts,
values of the current and/or magnetic field applied, technical
description of the instruments used (power supply unit, voltimeter,
amperimeter, Hall sensor, electromagnet, electrical noise filters,
...) in order to "make" my own experimental set up.
In these kind of "conductors", the lower resistivity, according with
literatue, is around 5.10-4 Ohms.cm, the higher carrier concentration
between 10-19 10-20 cm-3 and their mobility is around 25 cm-2/Vs.
Any suggestions will wellcome.
Thank you in advance,
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