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Subject: mini vacuum pump (<7mm!)

Date: 05/26/00 at 12:36 AM
Posted by: mike channell
E-mail: mike.channell@gecm.com
Message Posted:

Does Anyone out there know of a vacuum pump which is less than 7mm in diameter and can be battery powered.
I need to hold a semiconductor wafer to a portable vacuum chuck for several days. The chuck must be 150mm, <7mm thick and <0.5lBs
A mechanical system would suffice but as the vacuum chamber would have a very low volume a leak free system is imperative.
ANy ideas?

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