| Home | Terms of Use | Site Map | Contact Us |
IndustryCommunity.com > Manufacturing Community > Forum of High Vacuum Technology/Processing/Coating > Message
Main Menu
Find

[ List Subjects ][ Current Board ][ Post Message ]
[ View Followups ][ Post Followup ]

Subject: mini vacuum pump (<7mm!)

Date: 05/26/00 at 12:36 AM
Posted by: mike channell
E-mail: mike.channell@gecm.com
Message Posted:

Does Anyone out there know of a vacuum pump which is less than 7mm in diameter and can be battery powered.
I need to hold a semiconductor wafer to a portable vacuum chuck for several days. The chuck must be 150mm, <7mm thick and <0.5lBs
A mechanical system would suffice but as the vacuum chamber would have a very low volume a leak free system is imperative.
ANy ideas?

Follow Ups:


Post a Follow-up:

Name:
E-Mail:
Subject:

Message to Post:

 

Click here:
1999-2001 Sunlit Technology Co., Ltd. All rights reserved.