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Subject: Re: DC Diode Sputtering Parameters
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Date: 05/21/00 at 3:09 AM
Posted by: wcteng
In Reply to: DC Diode Sputtering Parameters posted by Jim Tisdall on 05/18/00 at 4:26 PM:
To my own experience, what you got with diode sputtering were those they were supposed to be. The heat genereated in your substrate was probably due to the bombardment of the electrons which were supposed to be trapped to the magnetron.
The best way I can figure out for you is to find a 2" magnetron.
If you can not get one, you might try increasing the Dts( distance between target and substrate). This will reduce the heat effect on the substrate. It, however, will decrease the coating rate also. The coating rate might be too low to be of use.
Hope that this information is helpful.
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