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Subject: Measurements on TCO conductive thin films

Date: 04/19/02 at 1:22 PM
Posted by: Rafael Ciloci
E-mail: lupanoleg@yahoo.com
Message Posted:

In Reply to: Hall measurements on conductive thin films posted by Espinůs, J.P. on 08/23/00 at 10:27 PM:

I am a researcher working in the field of Transparent Conductive Thin
(in particular, Al doped ZnO thin films). My work
requires me to prepare by CVD methods and characterize these thin films.

Can anyone kindly suggest some books or literature available on
electrical characterization of conductive thin films (thickness lower
than 500 nm) by Hall measurements by the Van der Pauw method?. In
particular, I need to know as many relevant experimental details as
possible (sample dimensions, how to make the electrode contacts, ohmic contacts to doped ZnO films
values of the current and/or magnetic field applied, technical
description of the instruments used to "make" my experimental set up.
In these kind of "conductors", the lower resistivity, according with
literatue, is around 5.10-4 Ohms.cm, the higher carrier concentration
between 10-19 10-20 cm-3 and their mobility is around 25 cm-2/Vs.

Any suggestions will wellcome.

Thank you in advance,
Ciloci Rafael

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