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Subject: Re: DC Diode Sputtering Parameters
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Date: 03/13/02 at 11:01 AM
Posted by: Bill Pierce
In Reply to: DC Diode Sputtering Parameters posted by Jim Tisdall on 05/18/00 at 4:26 PM:
We do DC diode sprttering of Os/Ru (80%20%). We use 2000 VDC, 15mA and about 50 mTorr. We adjust the current with the pressure.
I hope this helps.
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