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Subject: Re: DC Diode Sputtering Parameters

Date: 03/13/02 at 11:01 AM
Posted by: Bill Pierce
E-mail: bpierce@spectramat.com
Message Posted:

In Reply to: DC Diode Sputtering Parameters posted by Jim Tisdall on 05/18/00 at 4:26 PM:


We do DC diode sprttering of Os/Ru (80%20%). We use 2000 VDC, 15mA and about 50 mTorr. We adjust the current with the pressure.

I hope this helps.

Bill Pierce
Spectra-Mat, Inc.

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