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Subject: DC Diode Sputtering Parameters

Date: 05/18/00 at 4:26 PM
Posted by: Jim Tisdall
E-mail: aci@appliedcoatings.net
Message Posted:

I am trying to sputter Alumel from 2"diam. target. Using a 6"diam. magnetron, I can sputter at 10 to 30 mTorr (Ar) at, say, 2.0 amps/600 VDC. However, with the diode setup, I am needing to bring Ar pressure up to 100 to 150 mTorr before I can get any current, and then I have, say, 2000VDC/0.1A (different power supply). If I bring pressure down, V goes up/A down (as expected) and substrate gets too hot (glass melts).

Any thoughts?


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