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Subject: Re: How many kinds of sputtering machines ?

Date: 10/01/01 at 11:20 PM
Posted by: Rick
E-mail: rvanvorous@Pfeiffer-vacuum.com
Message Posted:

In Reply to: How many kinds of sputtering machines ? posted by Eric on 06/25/01 at 7:49 PM:

In general, there are basically two kinds of sputtering machines. Batch and load lock. Batch is the kind that you fill it up like a barrel, coat the parts and vent the entire system each time. The load lock approach keeps the main coating area under vacuum at all times and you inject a smaller batch (possibly one part or as many as hundreds depending upon the size of the lock). Load lock systems are ideal for high throughput but typically have much higher costs of purchase; howeverthey have higher productivity in many cases. Both kinds of systems can deposit the same materials. It is only a question of how often and how low you must pump the system before processing the next batch.

Contact the Society of Vacuum Coaters for more information or www.avs.org.


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