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Subject: Re: Hollow cathode discharge(HCD) technology

Date: 03/29/00 at 2:06 AM
Posted by: Kurt Schoedel
E-mail: kurt@nextsemi.com
Message Posted:

In Reply to: Hollow cathode discharge(HCD) technology posted by Martin on 03/05/00 at 3:14 AM:

The two major ion plating techniques are hollow cathode and cathodic arc. Both are heavily used in hard-coating of machine tools.

hollow cathode advantages:

1) smoother film than cathodic arc for any given deposition rate

disadvantages compared to cathodic arc:

1) power supply and machine design is more complicated
2) Process parameter control is more complicated
3) for any given chamber size, the batch through-put is less

Cathodic arc advantages:

1) more simple control of process parameters
2) power supply and machine design is more simple
3) For any given chamber size, the batch through-put is greater

Cathodic arc disadvantages relative to hollow cathode:

1) Macroparticles - results in rougher films than in the case of hollow cathode deposition


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