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Subject: Re: DC sputter Si

Date: 06/22/01 at 3:45 PM
Posted by: Robert choquette
E-mail: bobchoquette@aol.com
Message Posted:

In Reply to: DC sputter Si posted by Tom on 02/20/01 at 11:44 PM:

Try to introduce the reactive gas (O2) closer to the substrate and not at the dark space region. This can help the problem of extinguishing your cathode.

Regards,

BC


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