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Subject: sputtering parameters for Al and Cr

Date: 06/22/01 at 9:06 AM
Posted by: steve nicoletti
E-mail: stevenicoletti@hotmail.com
Message Posted:

I am a physics student at UALR and I want to sputter first Cromium and then Aluminum on Silicon substrate. I have a sputtering system available I need to find the sputtering parameters for Al and Cr.

Is there a standard list of sputtering parameters?

Thanks


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