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Subject: Re: DC sputter Si
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Date: 02/27/01 at 11:34 AM
Posted by: Rob Belan
In Reply to: DC sputter Si posted by Tom on 02/20/01 at 11:44 PM:
Mike Plaisted has some good thoughts. Silicon sputters pretty easily DC when doped - unless you are doing some sort of reactive gas inlet while sputtering. O2 will eventually form a dielectric layer over the entire Si target and choke off the plasma. Certainly in that instance a pulsed DC power supply (expensive!) will cut the aggravation down a bit.
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