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Subject: Re: DC sputter Si

Date: 02/27/01 at 11:34 AM
Posted by: Rob Belan
E-mail: rbelan@ii-vi.com
Message Posted:

In Reply to: DC sputter Si posted by Tom on 02/20/01 at 11:44 PM:

Mike Plaisted has some good thoughts. Silicon sputters pretty easily DC when doped - unless you are doing some sort of reactive gas inlet while sputtering. O2 will eventually form a dielectric layer over the entire Si target and choke off the plasma. Certainly in that instance a pulsed DC power supply (expensive!) will cut the aggravation down a bit.

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