In Reply to: DC sputter Si posted by Tom on 02/20/01 at 11:44 PM:
A lot depends on what properties you need in the film. The players are pure silicon with RF, doped silicon with enhanced DC, and SiAl alloys with 3-12 % aluinum with enhanced DC. All run every day.
In some appications the selection seems absolut while in othere it looks like a horse race where you get to pick the one to ride and go with it.
The solution for your spplication probably lies with power supply people. Target selections normaly come from those discussions.