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Subject: Re: DC sputter Si

Date: 02/21/01 at 7:55 AM
Posted by: U. Krause
E-mail: krause@fep.fhg.de
Message Posted:

In Reply to: DC sputter Si posted by Tom on 02/20/01 at 11:44 PM:

You are sputtering Si or SiO2 ?
Solution could be the a new pulsed power supply ...

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